A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/490/i=1/a=012007/pdf
Reference9 articles.
1. Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring
2. Multiparameter grating metrology using optical scatterometry
3. A maximum likelihood approach to the inverse problem of scatterometry
4. Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry
5. Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Prediction of critical dimensions for 3D TSV structures using artificial neural network;Metrology, Inspection, and Process Control XXXVIII;2024-04-10
2. Predicting the Critical Dimensions of Micron and Sub-micron Structures Using Joint Training Models and Electromagnetic Simulation Tools;International Journal of Precision Engineering and Manufacturing;2024-03-12
3. Solving multiphysics-based inverse problems with learned surrogates and constraints;Advanced Modeling and Simulation in Engineering Sciences;2023-10-11
4. Machine learning based priors for Bayesian inversion in MR imaging;Metrologia;2023-07-17
5. Neural network assisted multi-parameter global sensitivity analysis for nanostructure scatterometry;Applied Surface Science;2021-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3