Author:
Abrashitova K A,Kulagin G E,Petrov A K,Bessonov V O,Fedyanin A A
Abstract
Abstract
X-ray synchrotron and laboratory source radiation is used to solve a wide range of problems in modern science. Compound refractive lenses (CRLs) technology is a popular solution for focusing x-ray. However weak interaction of X-ray radiation with matter puts extra challenges for microfabrication techniques and materials. Two-photon lithography has been successfully applied for polymer CRL microfabrication. However polymer material is likely to degrade in intense X-ray beams. This article describes pyrolysis (heating in inert atmosphere) as an improvement of two-photon lithography technique. This extra step may produce ultrasmall curvature radii CRLs with extra durability in intense X-ray beams
Subject
General Physics and Astronomy