Study of nanomechanical properties of thin films using in-situ “Push-to-Pull” method in the column of transmission electron microscope

Abstract

Abstract The purpose of this study was to develop a method for determining the tensile strength of ion-plasma coatings during their nanodeformation in the column of a transmission electron microscope. The advanced oxidation-resistant coating in the Mo-Zr-Si-B system was selected as the object for mechanical testing. Coatings were deposited on alumina substrates by magnetron sputtering with hetero-phase cathode in system MoSi2-MoB-ZrB2 in argon environment. Coating’s characterization and testing were performed using XRD, SEM, EDS, GDOES, TEM, and nanoindentation. Nanomechanical study in TEM column was conducted in binding scheme using Push-to-Pull device and Picoindenter module on lamella prepared by FIB. Problems related to nanomechanical measurements and interpretation of the obtained dependences are discussed. Recommendations for the method of lamella preparing and parameters for testing were developed.