Abstract
Abstract
Detailed Monte-Carlo simulation of e-beam events in PMMA/Si system has been carried out. Polymer chains are modeled using random walk algorithm with subsequent assignment of simulated e-beam events to certain monomers. The processes leading to PMMA chain scission are determined to be ionization events on C atoms of PMMA backbone bond due to analysis of resist weight distributions, obtained by gel permeation chromatography.
Subject
General Physics and Astronomy