Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam-Reference-Cited by-同舟云学术

Formation of nanostructures on the surface of KTP single crystals by argon cluster ion beam

Published:2019-11-01 Issue:1 Volume:1382 Page:012162
ISSN:1742-6588
Container-title:Journal of Physics: Conference Series
language:
Short-container-title:J. Phys.: Conf. Ser.

Author:

Nikolaev I V,Korobeishchikov N G,Roenko M A

Abstract

Abstract In this work, the surface of potassium titanyl phosphate (KTP) single crystals has been processed by argon cluster ions having low energy per atom E/Nmean = 12.5 eV/atom. The formation of periodic nanostructures has been studied using atomic force microscopy (AFM) and the power spectral density (PSD) functions. To evaluate the processing efficiency, the dependence of the etching rate of KTP on the incident angles of cluster ions has been investigated. It is shown that the average etching rate 〈Vetch〉 varies between 0.46 and 1.1 nm/min with an incident angle change from 0° to 70°.

Publisher

IOP Publishing

Subject

General Physics and Astronomy

Link

https://iopscience.iop.org/article/10.1088/1742-6596/1382/1/012162/pdf

Reference13 articles.

1. Engineering atomic and molecular nanostructures at surfaces

2. Identifying the forces responsible for self-organization of nanostructures at crystal surfaces

3. The shape and ordering of self-organized nanostructures by ion sputtering

4. Formation of silicon nanodots via ion beam sputtering of ultrathin gold thin film coatings on Si

5. Ion-induced self-organized dot and ripple patterns on Si surfaces

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Research on chemical mechanical polishing of KTiOPO₄crystal;2022 8th International Conference on Nanomanufacturing & 4th AET Symposium on ACSM and Digital Manufacturing (Nanoman-AETS);2022-08-30

2. Potassium titanyl phosphate Z- and Y-cut surfaces from density-functional theory;Physical Review Materials;2021-06-14

3. Dark current issues for high gradient C-band medical linac;Journal of Instrumentation;2021-02-23

4. Surface ripples induced by gas cluster ion beam on copper surface at elevated temperatures;Materials Letters;2020-08