Growth evolution of ZnO thin films deposited by RF magnetron sputtering
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/370/i=1/a=012020/pdf
Reference21 articles.
1. Effect of Oxygen Concentration on Properties of Indium Zinc Oxide Thin Films for Flexible Dye-Sensitized Solar Cell
2. The effect of oxygen remote plasma treatment on ZnO TFTs fabricated by atomic layer deposition
3. Conductive and transparent Bi-doped ZnO thin films prepared by rf magnetron sputtering
4. Growth evolution of ZnO films deposited by pulsed laser ablation
5. A comparative study of the electrical properties of Pd/ZnO Schottky contacts fabricated using electron beam deposition and resistive/thermal evaporation techniques
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