Zinc oxide thin films deposited by magnetron sputtering with various oxygen/argon concentrations
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
http://stacks.iop.org/1742-6596/370/i=1/a=012019/pdf
Reference7 articles.
1. Physics and control of valence states in ZnO by codoping method
2. Fabrication of high hole-carrier density p-type ZnO thin films by N–Al co-doping
3. Characterization of ZnO thin films grown on various substrates by RF magnetron sputtering
4. Fabrication of p-type ZnO thin films via magnetron sputtering and phosphorus diffusion
5. Structural and optical properties of ZnO films on Si substrates using a γ-Al2O3buffer layer
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