Radiofrequency discharge benchmark model comparison-Reference-Cited by-同舟云学术

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Radiofrequency discharge benchmark model comparison

Published:1995-02-01 Issue:1 Volume:4 Page:56-73
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Surendra M

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference55 articles.

1. Dynamic model of the electrode sheaths in symmetrically driven rf discharges

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