Effect of electron Monte Carlo collisions on a hybrid simulation of a low-pressure capacitively coupled plasma
Author:
Funder
National Fusion Research Institute
Brain Korea 21 Plus
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/23/i=6/a=065040/pdf
Reference26 articles.
1. Transition between different regimes of rf glow discharges
2. Hybrid modelling of low temperature plasmas for fundamental investigations and equipment design
3. On the reliability of low-pressure dc glow discharge modelling
4. Simultaneous Potential and Circuit Solution for 1D Bounded Plasma Particle Simulation Codes
5. Measurement of free-free emission from low-energy-electron collisions with Ar
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