Observation of multiple charge states and high ion energies in high-power impulse magnetron sputtering (HiPIMS) and burst HiPIMS using a LaB6target
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Published:2014-04-16
Issue:3
Volume:23
Page:035001
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Franz RobertORCID,
Clavero César,
Bolat Rustem,
Mendelsberg Rueben,
Anders André
Subject
Condensed Matter Physics
Cited by
22 articles.
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