Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference17 articles.
1. Langmuir probe measurements of a radio frequency induction plasma
2. Novel radio‐frequency induction plasma processing techniques
3. Electron‐density and energy distributions in a planar inductively coupled discharge
4. Ion energy and angular distributions in inductively coupled radio frequency discharges in argon
5. Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine
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