Study of a HPPMS discharge in Ar/O2mixture: II. Plasma optical emission and deposited RuOxfilm properties
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference43 articles.
1. Study of a HPPMS discharge in Ar/O2mixture: I. Discharge characteristics with Ru cathode
2. A novel pulsed magnetron sputter technique utilizing very high target power densities
3. Target material pathways model for high power pulsed magnetron sputtering
4. Pulsed dc Magnetron Discharges and their Utilization in Plasma Surface Engineering
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