High power impulse magnetron sputtering and its applications
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
https://iopscience.iop.org/article/10.1088/2058-6272/aa9e48/pdf
Reference126 articles.
1. An Overview on Time-Resolved Optical Analysis of HiPIMS Discharge
2. HIPIMS: The New PVD Technology
3. Evolution of the electron energy distribution and plasma parameters in a pulsed magnetron discharge
4. Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
5. Influence of high power densities on the composition of pulsed magnetron plasmas
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