Heating of a dual frequency capacitively coupled plasma via the plasma series resonance
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference24 articles.
1. Capacitively coupled glow discharges at frequencies above 13.56 MHz
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1. Numerical characterization of dual radio frequency micro-discharges;AIP Advances;2023-03-01
2. Effect of parallel resonance on the electron energy distribution function in a 60 MHz capacitively coupled plasma;Plasma Science and Technology;2023-02-08
3. The discharged characteristics of capacitively coupled Ar/N2 plasma driven by the dual frequency 8/100 MHz;The European Physical Journal Applied Physics;2023
4. Frequency coupling in low-pressure dual-frequency capacitively coupled plasmas revisited based on the Boltzmann term analysis;Plasma Sources Science and Technology;2022-11-01
5. The PSR effect of matching network in 8/100 MHz geometrically symmetrical capacitively coupled Ar plasma;Physics of Plasmas;2022-10
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