Ion temperature and velocity in a 300 mm diameter capacitively coupled plasma reactor driven at 13, 60 and 162 MHz-Reference-Cited by-同舟云学术

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Ion temperature and velocity in a 300 mm diameter capacitively coupled plasma reactor driven at 13, 60 and 162 MHz

Published:2010-01-07 Issue:1 Volume:19 Page:015020
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Hebner G A,Paterson A M

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference21 articles.

1. Transport of argon ions in an inductively coupled high-density plasma reactor

2. Measurements of Ar+ and Xe+ velocities near the sheath boundary of Ar–Xe plasma using two diode lasers

3. Experimental Studies of the Bohm Criterion in a Two-Ion-Species Plasma Using Laser-Induced Fluorescence

4. Diode laser-induced fluorescence measurements of metastable argon ions in a magnetized inductively coupled plasma

5. High time resolution laser induced fluorescence in pulsed argon plasma

Cited by 12 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nitriding process for next-generation semiconductor devices by VHF (162 MHz) multi-tile push-pull plasma source;Applied Surface Science;2020-03

2. Transverse magnetic field effects on spatial electron temperature distribution in a 13.56 MHz parallel plate capacitive discharge;Physics of Plasmas;2020-03

3. Crystallization of bismuth iron garnet thin films using capacitively coupled oxygen plasmas;Journal of Applied Physics;2020-01-31

4. Observation of the standing wave effect in large-area, very-high-frequency capacitively coupled plasmas by using a fiber Bragg grating sensor;Journal of Applied Physics;2018-06-14

5. Silicon Nitride Deposition for Flexible Organic Electronic Devices by VHF (162 MHz)-PECVD Using a Multi-Tile Push-Pull Plasma Source;Scientific Reports;2017-10-19

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