Dual-frequency capacitively coupled chlorine discharge
Author:
Funder
Icelandic Research Fund
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=1/a=015003/pdf
Reference56 articles.
1. Principles of Plasma Discharges and Materials Processing
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4. Coupling effects of driving frequencies on the electron heating in electronegative capacitive dual-frequency plasmas
5. Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas
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