On the role of plasma-surface interactions in dc magnetron discharges in Ar-N2gas mixtures
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference20 articles.
1. Influence of the composition of gas mixture on the stoichiometry of sputter-deposited compound films: The case of zirconium nitrides
2. Optical emission of magnetron discharges as a function of the composition of argon—nitrogen gas mixtures
3. Analysis of DC magnetron discharges in Ar- gas mixtures. Comparison of a collisional-radiative model with optical emission spectroscopy
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