Active species downstream of an Ar–O2surface-wave microwave discharge for biomedicine, surface treatment and nanostructuring
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference101 articles.
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3. Increased O(D1) metastable density in highly Ar-diluted oxygen plasmas
4. Oxygen discharges diluted with argon: dissociation processes
5. Atomic oxygen densities in a downstream microwave O2/Ar plasma source
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