Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing-Reference-Cited by-同舟云学术

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Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

Published:2008-01-10 Issue:1 Volume:17 Page:015014
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Lee Kyeonghyo,Lee Youngkwang,Jo Sungwon,Chung Chin-Wook,Godyak Valery

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference10 articles.

1. Principles of Plasma Discharges and Materials Processing

2. Ferrite Core Effects in a 13.56 MHz Inductively Coupled Plasma

3. Design of a magnetic-pole enhanced inductively coupled plasma source

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