Ferrite Core Effects in a 13.56 MHz Inductively Coupled Plasma-Reference-Cited by-同舟云学术

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Ferrite Core Effects in a 13.56 MHz Inductively Coupled Plasma

Published:1999-07-30 Issue:Part 1, No. 7B Volume:38 Page:4275-4279
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:en
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lloyd Shane,Shaw Denis M.,Watanabe Masahiro,Collins George J.

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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2. Probe Diagnostics and Optical Emission Spectroscopy of Wave Plasma Source Exhaust;Symmetry;2022-09-22

3. Heating mechanisms for electron swarms in radio-frequency electric and magnetic fields;Plasma Sources Science and Technology;2015-09-23

4. Ferromagnetic enhanced inductive plasma sources;Journal of Physics D: Applied Physics;2013-06-25

5. Plasma Characteristics of a Ni–Zn Ferrite Enhanced Internal-Type Inductively Coupled Plasma Source Operated at 2 and 13.56 MHz;Plasma Chemistry and Plasma Processing;2009-11-20

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