High-density plasma production using a slotted helical antenna at high microwave power
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference35 articles.
1. Production of Quiescent Discharge with High Electron Temperatures
2. Production of a large diameter hot‐electron plasma by electron cyclotron resonance heating
3. Temporal Behaviour of ECR Plasmas Produced by a Lisitano Coil
4. Feed optimization for the slotted line antenna for high-density plasma production
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