Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge-Reference-Cited by-同舟云学术

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Theoretical and experimental study of ion flux formation in an asymmetric radio-frequency capacitive discharge

Published:2011-01-07 Issue:1 Volume:20 Page:015011
ISSN:0963-0252
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Schweigert I V,Ariskin D A,Chernoiziumskaya T V,Smirnov A S

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Reference16 articles.

1. On the possibility of making a geometrically symmetric RF-CCP discharge electrically asymmetric

2. PIC simulations of the separate control of ion flux and energy in CCRF discharges via the electrical asymmetry effect

3. Application of RF Discharges to Sputtering

4. Positive‐ion bombardment of substrates in rf diode glow discharge sputtering

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1. Acceleration of ions in a plasma accelerator with closed electron drift based on a capacitive radio-frequency discharge;Vacuum;2020-10

2. Control of Dual Frequency Capacitively Coupled Plasma via blocking capacitor and phase angle;The European Physical Journal Applied Physics;2017-10

3. Periodical plasma structures controlled by external magnetic field;Plasma Sources Science and Technology;2017-05-16

4. Periodical plasma structures controlled by external magnetic field;AIP Conference Proceedings;2016

5. Mode transition in miniature dc discharge driven by an auxiliary electrode;Plasma Sources Science and Technology;2015-06-05

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