Electron density characterization of inductively-coupled argon plasmas by the terahertz time-domain spectroscopy
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/25/i=6/a=065008/pdf
Reference28 articles.
1. Plasma-Surface Interactions and Processing of Materials
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3. Principles of Plasma Diagnostics
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