Self-consistent simulation of very high frequency capacitively coupled plasmas
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference15 articles.
1. Verification of frequency scaling laws for capacitive radio‐frequency discharges using two‐dimensional simulations*
2. Nonlinear dynamics of radio frequency plasma processing reactors powered by multifrequency sources
3. Standing wave and skin effects in large-area, high-frequency capacitive discharges
4. Inductive heating and E to H transitions in high frequency capacitive discharges
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