Ion energy distribution functions in a planar inductively coupled RF discharge
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Published:1995-11-01
Issue:4
Volume:4
Page:541-550
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Kortshagen U,Zethoff M
Subject
Condensed Matter Physics
Cited by
70 articles.
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