Argon metastables in HiPIMS: validation of the ionization region model by direct comparison to time resolved tunable diode-laser diagnostics
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Link
http://stacks.iop.org/0963-0252/24/i=4/a=045011/pdf
Reference60 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
2. Ionized physical vapor deposition (IPVD): A review of technology and applications
3. High power pulsed magnetron sputtering: A review on scientific and engineering state of the art
4. Plasma diagnostics for understanding the plasma–surface interaction in HiPIMS discharges: a review
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