EUV induced low temperature SF6-based plasma
Author:
Publisher
IOP Publishing
Subject
Mathematical Physics,Instrumentation
Link
http://stacks.iop.org/1748-0221/11/i=03/a=C03009/pdf
Reference25 articles.
1. Enhancement of polymer hydrophobicity by SF6 plasma treatment and argon plasma immersion ion implantation
2. Fluorination of polymethylmethacrylate with SF6 and hexafluoropropylene using dielectric barrier discharge system at atmospheric pressure
3. Wettability and Dyeability Modulation of Poly(ethylene terephthalate) Fibers through Cold SF6 Plasma Treatment
4. Properties of hydrogenated amorphous carbon films deposited by PECVD and modified by SF6 plasma
5. The functionalization of graphene using electron-beam generated plasmas
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2. Soft x-ray photoabsorption spectra of photoionized CH4and CO2plasmas;Journal of Physics B: Atomic, Molecular and Optical Physics;2020-01-27
3. Reflective optics for effective collection of x-ray and EUV radiation: use for creation of photoionized plasmas and detection of weak signals;SPIE Proceedings;2017-05-31
4. EUV induced photoionized plasma, a medium for spectral investigation;Journal of Physics: Conference Series;2017-02
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