Breath analysis system based on phase-shifting interferometric microscopy readout of microcantilever arrays
Author:
Publisher
IOP Publishing
Subject
Pulmonary and Respiratory Medicine
Reference31 articles.
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3. Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films;Journal of Micromechanics and Microengineering;2014-05-19
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