Time evolution of ion energies in HIPIMS of chromium plasma discharge
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/42/i=13/a=135209/pdf
Reference25 articles.
1. A novel pulsed magnetron sputter technique utilizing very high target power densities
2. Plasma dynamic in chromium and titanium HIPIMS discharges
3. Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges
4. The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
5. Pulsed dc Magnetron Discharges and their Utilization in Plasma Surface Engineering
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