Mechanisms for ion-irradiation-induced relaxation of stress in mosaic structured Cu thin films
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Reference38 articles.
1. Thin Film Materials
2. Stresses and deformation processes in thin films on substrates
3. Mechanical Properties of Thin Films on Substrates
4. Properties and microstructure of tungsten films deposited by ion-assisted evaporation
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1. Effect of Low-Energy Ion Bombardment on the Texture and Microstructure of Platinum Films;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-02
2. Ion irradiation-induced localized stress relaxation in W thin film revealed by cross-sectional X-ray nanodiffraction;Thin Solid Films;2021-03
3. The effect of low-energy ion bombardment on residual stress in thin metal films due to the generation of surface defects and their migration to the grain boundary;Journal of Physics: Conference Series;2020-12-01
4. The curious mechanism of irradiation-induced cryogenic grain growth in tungsten thin films: A pathway to single crystals;Acta Materialia;2020-04
5. Effect of Ar ion-plasma treatment on residual stress in thin Cr films;International Conference on Micro- and Nano-Electronics 2018;2019-03-15
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