Target temperature simulation during fast-pulsing plasma immersion ion implantation
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/34/i=11/a=313/pdf
Reference24 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma immersion ion implantation—a fledgling technique for semiconductor processing
3. Cross-sectional transmission electron microscopy characterisation of plasma immersion ion implanted austenitic stainless steel
4. Significance of nitrogen mass transfer mechanism on the nitriding behavior of austenitic stainless steel
5. Microstructure, corrosion and tribological behaviour of plasma immersion ion-implanted austenitic stainless steel
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