Neutral particle lithography: a simple solution to charge-related artefacts in ion beam proximity printing
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/41/i=2/a=024007/pdf
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