Author:
Sreenivasan S. V.,Willson C. Grant,Schumaker Norman E.,Resnick Douglas J.
Cited by
18 articles.
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1. Fluid flow in UV nanoimprint lithography with patterned templates;Microelectronic Engineering;2017-04
2. Effect of droplet size, droplet placement, and gas dissolution on throughput and defect rate in UV nanoimprint lithography;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2017-01
3. Step-and-Repeat Nanoimprint-, Photo- and Laser Lithography from One Customised CNC Machine;Nanoscale Research Letters;2016-03-08
4. A novel, organic, UV-sensitive resist ideal for nanoimprint-, photo- and laser lithography in an air atmosphere;Electronic Materials Letters;2015-06-30
5. Enhanced photocurrent in thin-film amorphous silicon solar cells via shape controlled three-dimensional nanostructures;Nanotechnology;2012-09-20