A model of plasma source ion implantation for inner surface modification
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/29/i=1/a=042/pdf
Reference8 articles.
1. Plasma source ion‐implantation technique for surface modification of materials
2. Plasma source ion implantation: A new, cost-effective, non-line-of-sight technique for ion implantation of materials
3. Model of plasma source ion implantation in planar, cylindrical, and spherical geometries
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