Theory of current modulation in a liquid metal ion source using thermal effects

Author:

Mair G L R

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Liquid Metal Ion Sources;Handbook of Charged Particle Optics, Second Edition;2008-10-24

2. Application of mass-separated focused ion beams in nano-technology;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2008-04

3. Alloy liquid metal ion sources and their application in mass separated focused ion beams;Ultramicroscopy;2005-04

4. On the temperature dependence of the electric characteristics and mass spectra of liquid metal alloy ion sources;Ultramicroscopy;2003-05

5. A study of liquid metal alloy ion sources for the production of ions of interest in the microelectronics industry;Solid-State Electronics;2001-06

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