Application of mass-separated focused ion beams in nano-technology-Reference-Cited by-同舟云学术

Application of mass-separated focused ion beams in nano-technology

Published:2008-04 Issue:8 Volume:266 Page:1846-1851
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Bischoff L.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference51 articles.

1. High Resolution Focused Ion Beams;Orloff,2003

2. Focused Ion Beams from Liquid Metal Ion Sources;Prewett,1991

3. Repair of opaque defects in photomasks using focused ion beams

4. Focused ion beam induced deposition of platinum for repair processes

5. R. Boylan, M. Ward, D. Tuggle, in: Proceedings of the International Symposium for Testing and Failure Analysis, ASM International, Los Angeles, 1989, p. 249.

Cited by 29 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Direct magnetic manipulation of a Permalloy nanostructure by a focused cobalt-ion beam;Physical Review Applied;2023-10-26

2. Near Infrared Efficiency Enhancement of Silicon Photodiodes by Integration of Metal Nanostructures Supporting Surface Plasmon Polaritrons;Sensors;2023-01-11

3. Electrohydrodynamic emitters of ion beams;Physics-Uspekhi;2020-12-01

4. Introduction to focused ion beams, ion sources, and the nano-aperture ion source;Advances in Imaging and Electron Physics Including Proceedings CPO-10;2019

5. Directed Self-Assembly of Ge Quantum Dots Using Focused Si2+ Ion Beam Patterning;Scientific Reports;2018-06-19