Influence of Cr-doping on microstructure and piezoelectric response of AlN films
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/42/i=23/a=235406/pdf
Reference38 articles.
1. Aluminium nitride films prepared by reactive magnetron sputtering
2. Molecular beam epitaxy and doping of AlN at high growth temperatures
3. Surface acoustic wave velocity in single-crystal AlN substrates
4. Zero-Temperature-Coefficient SAW Devices on AlN Epitaxial Films
5. Growth of AlN piezoelectric film on diamond for high-frequency surface acoustic wave devices
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