Spectral characterization of medium-pressure RF discharge in argon–oxygen mixture
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/47/i=33/a=335206/pdf
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1. Study of the surface mechanisms in an Ar–N2 post-discharge cleaning process
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