Argon metastable densities in radio frequency Ar, Ar/O2 and Ar/CF4 electrical discharges
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.366111
Reference31 articles.
1. Two‐dimensional argon metastable density measurements in a radio frequency plasma reactor by planar laser‐induced fluorescence imaging
2. Two‐dimensional laser‐induced fluorescence imaging of metastable density in low‐pressure radio frequency argon plasmas with added O2, Cl2, and CF4
3. Two-dimensional images of CF/sub 2/ density in CF/sub 4//Ar plasmas by laser-induced fluorescence in a GEC RF reference cell
4. Spatial variations in the charge density of argon discharges in the Gaseous Electronics Conference reference reactor
5. Two-Dimensional Self-Consistent Radio-Frequency Plasma Simulations Relevant to the Gaseous Electronics Conference Rf Reference Cell
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