Optical investigation methods for SiC device development: application to stacking faults diagnostic in active epitaxial layers
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/40/i=20/a=S11/pdf
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