Dynamics of ablation of polymethyl methacrylate films by near ultraviolet light of an Ar+laser
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/27/i=1/a=003/pdf
Reference15 articles.
1. Direct writing in self‐developing resists using low‐power cw ultraviolet light
2. Deep ultraviolet laser etching of vias in polyimide films
3. Direct writing in polymethyl methacrylate films using near‐ultraviolet light of Ar+laser
4. Deep UV Ablation of PMMA Resists
5. Dynamics of UV laser ablation of organic polymer surfaces
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