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Self-consistent Monte Carlo modelling of RF plasma in a helium-like model gas

  • Published:1992-03-14 Issue:3 Volume:25 Page:442-452
  • ISSN:0022-3727
  • Container-title:Journal of Physics D: Applied Physics
  • language:
  • Short-container-title:J. Phys. D: Appl. Phys.

Author:

Date A,Kitamori K,Sakai Y,Tagashira H

Publisher

IOP Publishing

Subject

Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Cited by 47 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Monte Carlo simulation of radio-frequency plasmas in N2;International Journal of Numerical Modelling: Electronic Networks, Devices and Fields;2011-02-20

2. Modeling of Townsend discharges at high E/N and low pressure;Journal of Physics: Conference Series;2008-10-01

3. Particle Simulation Study of Transition of Spatial Structure in a Plane-Parallel Hollow Cathode Discharge;Japanese Journal of Applied Physics;2006-10-24

4. Spatio temporal Variation of the Density Distributions in Ar RF Plasmas Using the Monte Carlo Simulation/Legendre Polynomial Weighted Sampling Method;Japanese Journal of Applied Physics;2003-03-15

5. Monte Carlo Simulation of an Ar RF Parallel Plate Discharge Plasma Employing LPWS;IEEJ Transactions on Fundamentals and Materials;2003
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