Spatial Distribution of ECR Plasma Density in ECR-PECVD Reaction Chamber
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics
Reference13 articles.
1. Experimental electron energy distribution functions in argon, nitrogen and oxygen high-density and low-pressure reflex and microwave plasma sources
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5. Characterizations of SnO2 and SnO2:Sb thin films prepared by PECVD
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1. Correlation of III/V semiconductor etch results with physical parameters of high-density reactive plasmas excited by electron cyclotron resonance;Plasma Science and Technology;2017-10-24
2. Numerical study on uniformity of electron cyclotron resonance plasma density;Acta Physica Sinica;2011
3. Optical Emission Spectroscopy of Electron Cyclotron Resonance-Plasma Enchanced Metalorganic Chemical Vapor Deposition Process for Deposition of GaN Film;Plasma Science and Technology;2008-02
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