Design and assessment of monolithic high precision translation mechanisms
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering,General Materials Science,Instrumentation
Link
http://stacks.iop.org/0022-3735/20/i=8/a=005/pdf
Reference18 articles.
1. On the Construction of a Zerodur Translation Device for X-Ray Interferometric Scanning
2. Comparison of instruments for measuring step heights and surface profiles
3. Calibration Of Surface Roughness Transducers At Angstrom Levels Using X-Ray Interferometry
4. Selection of structural materials for precision devices
5. OPTICAL AND X‐RAY INTERFEROMETRY OF A SILICON LATTICE SPACING
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