A Study on the Dual Servo System for Nano Machining Processing

Author:

Lee Gyung-IlORCID

Funder

Songwon University

Publisher

Korean Society of Precision Engineering

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering,Safety, Risk, Reliability and Quality

Reference24 articles.

1. Kim, J., Lee, H.-N., Kwac, L., Han, J., Cho, Y.-T., Jun, C.-G., (2000), Control performance evaluation of ultra precision positioning apparatus, Proceedings of the International Society of Internal Medicine Conference, 252-255.

2. Research on the design of the ultra-high-precision positioning control error compensation

3. Kim, J., Han, J., Kim, H., You, S., Kwac, L., Song, I., (1997), A study on the optimal structural design and ultra precision position control using FEM for micro stage, Proceedings of the Korean Society of Precision Engineering Conference, 336-340.

4. A fine tool servo system for global position error compensation for a miniature ultra-precision lathe

5. Review of circular flexure hinge design equations and derivation of empirical formulations

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