Planarized multi-layer fabrication technology for LTS large-scale SFQ circuits-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Planarized multi-layer fabrication technology for LTS large-scale SFQ circuits

Published:2003-11-07 Issue:12 Volume:16 Page:1483-1486
ISSN:0953-2048
Container-title:Superconductor Science and Technology
language:
Short-container-title:Supercond. Sci. Technol.

Author:

Nagasawa Shuichi,Hinode Kenji,Sugita Masao,Satoh Tetsuro,Akaike Hiroyuki,Kitagawa Yoshihiro,Hidaka Mutsuo

Publisher

IOP Publishing

Subject

Materials Chemistry,Electrical and Electronic Engineering,Metals and Alloys,Condensed Matter Physics,Ceramics and Composites

Reference8 articles.

1. A 380 ps, 9.5 mW Josephson 4-Kbit RAM operated at a high bit yield

2. Planariation technology for Josephson integrated circuits

3. Sub‐μm, planarized, Nb‐AlOx‐Nb Josephson process for 125 mm wafers developed in partnership with Si technology

4. Fabrication technology for high-density Josephson integrated circuits using mechanical polishing planarization

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Investigation of the Mo and MoNx Thin Films for Superconducting Electronics Application;Journal of Low Temperature Physics;2022-11-22

2. Planarized Nb 4-Layer Fabrication Process for Superconducting Integrated Circuits and Its Fabricated Device Evaluation;IEICE Transactions on Electronics;2021-09-01

3. Fabrication of deep-sub-micrometer NbN/AlN/NbN epitaxial junctions on a Si-substrate;Applied Physics Express;2020-11-05

4. Planarized Process for Single-Flux-Quantum Circuits With Self-Shunted Nb/Nb$_{x}$Si$_{1-x}$/Nb Josephson Junctions;IEEE Transactions on Applied Superconductivity;2019-09

5. LTS Josephson Junctions and Circuits;digital Encyclopedia of Applied Physics;2015-12-08

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3