Deposition and sensing properties of PT/PZT/PT thin films for microforce sensors
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
Link
http://stacks.iop.org/1402-4896/2007/i=T129/a=047/pdf
Reference13 articles.
1. Preparation of epitaxial Pb(ZrxTi1−x)O3thin films and their crystallographic, pyroelectric, and ferroelectric properties
2. Fabrication and characterization of PZT thin-film vibrators for micromotors
3. Self-excited piezoelectric PZT microcantilevers for dynamic SFM—with inherent sensing and actuating capabilities
4. Surface micromachined piezoelectric accelerometers (PiXLs)
5. Design, fabrication, and measurement of high-sensitivity piezoelectric microelectromechanical systems accelerometers
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1. Electrohydrodynamic atomization deposition and mechanical polishing of PZT thick films;Ceramics International;2016-08
2. Fabrication of multilayer Pb(Zr,Ti)O3thin film by sputtering deposition for MEMS actuator applications;Japanese Journal of Applied Physics;2015-09-08
3. Thin-film piezoelectric bimorph actuators with increased thickness using double Pb[Zr,Ti]O3layers;Journal of Micromechanics and Microengineering;2015-03-31
4. Process optimisation of a MEMS based PZT actuated microswitch;Microelectronic Engineering;2014-05
5. Piezoelectric MEMS-based wideband energy harvesting systems using a frequency-up-conversion cantilever stopper;Sensors and Actuators A: Physical;2012-10
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