Reactive magnetron sputter deposition of (Ti,Cu)N nano-crystalline thin films: modeling of particle and energy flux toward the substrate
Author:
Publisher
IOP Publishing
Subject
Condensed Matter Physics,Mathematical Physics,Atomic and Molecular Physics, and Optics
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2. Correlation between Magnetron Discharge and Characteristics of Alloy (Ti,Cu)N Nano-Structure Thin Films;ECS Journal of Solid State Science and Technology;2016
3. Cu-doped ZnO nanoparticles synthesized by simple co-precipitation route;The European Physical Journal Plus;2014-11
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