An evaluation of cleaning methods for micro-CMM probes
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/24/i=8/a=085603/pdf
Reference13 articles.
1. Probing system for measurement of micro-scale components
2. Evaluation on the probing error of a micro-coordinate measuring machine
3. Aspects of tactile probing on the micro scale
4. AFM investigation on surface damage caused by mechanical probing with small ruby spheres
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3. Measurement Techniques for Three-Dimensional Metrology of High Aspect Ratio Internal Features—A Review;Metrology;2023-04-17
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