Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas
Author:
Publisher
IOP Publishing
Subject
Applied Mathematics,Instrumentation,Engineering (miscellaneous)
Link
http://stacks.iop.org/0957-0233/23/i=8/a=085001/pdf
Reference17 articles.
1. Principles of Plasma Discharges and Materials Processing
2. Probe measurements of electron-energy distributions in plasmas: what can we measure and how can we achieve reliable results?
3. The Theory of Collectors in Gaseous Discharges
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